Showing items 1 - 3 of 3

Control of a novel 2-DoF MEMS nanopositioner with electrothermal actuation and sensing

- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza

Closed-loop control of a novel 2-DOF MEMS nanopositioner with electrothermal actuation

- Fowler, Anthony G., Rakotondrabe, Micky, Moheimani, S. O. Reza

Characterization of a 2-DoF MEMS nanopositioner with integrated electrothermal actuation and sensing

- Rakotondrabe, Micky, Fowler, Anthony G., Moheimani, S. O. Reza

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